PURPOSE
This app can be used to smooth data with Gaussian filter, and calculate roughness for surface metrology.
INSTALLATION
Download the file Gaussian_Filter_in_Surface Metrology.opx, and then drag-and-drop onto the Origin workspace. An icon will appear in the Apps Gallery window.
NOTE: This tool requires OriginPro.
OPERATION
- Make a worksheet or graph active. Click Gaussian Filter in Surface Metrology app icon in Apps Gallery window.
- In the opened dialog, set a value to Cutoff Wavelength. Click Preview button to preview the waviness.
- Click OK button. Waviness and roughness data will be created in the worksheet.
SAMPLE OPJU FILE
This app provides a sample OPJU file. Right click on the Gaussian Filter in Surface Metrology icon in the Apps Gallery window, and choose Show Samples Folder from the short-cut menu. A folder will open. Drag-and-drop the project file GaussFilterEx.opju from the folder onto Origin. The Notes window in the project shows detailed steps.
Note: If you wish to save the OPJU after changing, it is recommended that you save to a different folder location (e.g. User Files Folder).
ALGORITHM
An approximation filter with order n=8 is used.
\(H_8( \lambda_c/\lambda ) = \left ( \frac{ \text{sin}( c_8 \pi \lambda_c/\lambda ) } { c_8 \pi \lambda_c/\lambda } \right )^8\), where \(\lambda_c\) is the cutoff wavelength, \(c_8\)=0.2275.
The discrete form is:
\(H_8( N/N_c ) = \left ( \frac{1}{2k+1} \cdot \frac{ \sin( (2k+1) \pi /N )}{ \sin( \pi/N) } \right )^8\), where k is calculated by minimizing \(| 2k+1-C_8N_c |\), and Nc is the cutoff length determined by the cutoff wavelength.
REFERENCE
1. Y.B. Yuan, T.V. Vorburger, J.F. Song, T.B. Renegar, A Simplified Realization for the Gaussian Filter in Surface Metrology, X. International Colloquium on Surfaces, Chemnitz (Germany), Jan. 31 - Feb. 02, 2000
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